Our Product
Business Areas
Equipment renovation
- Home
- Business Areas
- Equipment renovation
Modification Kit Assy
Load port modification for compatibility with 2,300mm wafers
-
Available Loadport Model : Vision LP
-
Available Loadport Model : Vision Leap
Features
- Design that meets the clean environment of ISO Class 2 or higher
- Increased equipment utilization (available for all 2,300mm wafer processes)
- Effect of reduction in equipment investment cost
Load port modification detail
※ The product is provided with the on-site installation service.
Adapter Detail
- For 300mm load ports
- 200mm wafer adapter
- Adapter available for various load ports
- Cover design to maintain clean environment
