Our Product
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Enhancement of end effector
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- Business Areas
- Enhancement of end effector
Localization of Company L products
A contaminated end effector can be replaced
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Robot error occurs due to corrosion by fume
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Domestic end effectors identical to the existing products can be provided
New Type End Effector로 교체 가능
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ATM End Effector
Vacuum Grip Type
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VTM End Effector
Passive Type
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Anti-corrosion effect by
changing the body material
and the coating material -
Pick Place Error reduced
by removing the O-ring -
Cost reduction by using a
domestic end effector with the
same features as the original one -
Blade replacement and
on-site service
by a qualified engineer
End effector for wafer sliding detection
- Existing problems
- Wafer sliding problem of
the existing passive type - Pad wear problem
- Solution : SMART End Effector
- Wafer sliding detection
and control using sensors - Product localization, replaceable pad
Application Number : 10-2019-0067546
Applied processes : CVD, PVD, Metal processes
Applicable robots : Robots of Company B, Y, etc
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Customized service
Possible to respond and
provide service depending
on site situation -
Price competitiveness
Cost reduction by product
localization and replaceable
worn pads -
Accident prevention
Prevents wafer damage due
to wafer sliding and prevents
accidents inside the load lock -
Standardization
Standardization of sliding
precision control