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Refurbishment equipment

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Brooks Automation

  • Reliance Robot 3,4axis (Series 8 ATR)

    Major OEM: 3axis: Novellus, Jusung, Rudolph, 4axis: Lam, KLA, SemiLab

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Lam, Jusung, KLA, SemiLab, Rudolph

  • Aculigner
    (Series 8 Aligner)

    Major OEM: Novellus, Lam, Jusung, KLA, SemiLab, Rudolph

  • MagnaTran 7 SCARA
    (Series 8 VTR)

    Major OEM: Lam, HKE

  • MagnaTran7 Leapfrog
    (Series 8 VTR)

    Major OEM: Jusung, ASM

  • MagnaTran7 Frogleg
    (Series 8 VTR)

    Major OEM: Novellus, Lam

  • MagnaTran7 BiSymmetrik
    (Series 8 VTR)

    Major OEM: Novellus, TES, Eugen tech, TEL

  • Razor Robot (Series 9 ATR)

    Major OEM: Novellus, Lam, Nanomatrix, Eugen tech, TES, matrix

  • Fusion Controller (Series 9 Controller)

    Major OEM: Novellus, Lam, Nanomatrix, Eugen tech, TES, matrix

  • Series 9 Aligner

    Major OEM: Lam, Nanomatrix, Eugen tech, TES, matrix

  • MagnaTran 8 QuadraFly & Producer (Series 9 ATR)

    Major OEM: Novellus, (Mag 8 QuadraFly), AMAT (Mag 8 Producer )

  • MagnaTran 8 Radius (Series 9 VTR)

    Major OEM: Sosul, ATTO and Others

PRI & EQUIPE

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

  • Reliance Robot Controller (Series 8 Controller)

    Major OEM: Novellus, Sosul,
    ATTO and Others

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