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02_[브로셔]_Sorter BLUE Label Series중문_191212.pdf (436.2K)
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DATE : 2021-02-18 11:25:12
Wafer Sorter
• Blue label Series (蓝标系列)
• Footprint 最优化设计
• 可混用200和300mm晶圆
Blue label 2000
• Wafer Size: 300mm , 200mm (with Adapter)
• Class: ISO Class 2 以上
• WPH : 250 (with out OCR), 200 (with OCR)
• Repeatability : R axis<0.3mm, T axis <0.02mm, Z axis<0.05mm
• MCBF: 12
|
MODEL |
WIDTH |
DEPTH "A" |
DEPTH "B" |
HEIGHT |
BlueLabel 2000 |
1,120.6mm |
662.2mm |
1,155.7mm |
1,864.6mm |
Developing Series
|
|
