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02_[브로셔]_Sorter BLUE Label Series영문.pdf (404.4K)
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DATE : 2021-02-18 11:20:59
Wafer Sorter
• Blue label Series (블루라벨 시리즈)
• Footprint 최적화 설계
• 2,300mm 웨이퍼 혼용 가능
Blue label 2000
• Wafer Size: 300mm , 200mm (with Adapter)
• Class: ISO Class 2 이상
• WPH : 250 (with out OCR), 200 (with OCR)
• Repeatability : R axis<0.3mm, T axis <0.02mm, Z axis<0.05mm
• MCBF: 12
|
MODEL |
WIDTH |
DEPTH"A" |
DEPTH"B" |
HEIGHT |
BlueLabel 2000 |
1,120.6mm |
662.2mm |
1,155.7mm |
1,864.4mm |
Developing Series
|
|
