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Brooks Automation
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ISOPORT
Major OEM: Ulvac, KLA-Tencor, FSM
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Vision LP
Major OEM: Novellus, Rudolph, Nanometrics, KLA, Woowon(HSEB)
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Fixload
Major OEM: Novellus, KLA-Tencor, Woowon, Varian, HKE
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FOUP LPM
Major OEM: Lam, Nanometrics(Accent), Negivtech
Maintenance Parts
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Assy CPU board ISOPort
Assy HoldDown Node
Assy Frame Node
Assy Hold down
DC motor (Vertical, Horizontal, Latchkey, FoupAdvance)
Z brake
ASY Break the Beam Mapper
Alignment
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LCD Moduel & LCD Baord
VCN Board
Main Board
Shuttle motor or Assy
Suction cup
Power Supply
(Clamp, Latch, Tilt, Shuttle, Z Motor and others)
Alignment
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ST32 Module
Suction cup, complete
Through Beam Mapper
cylinders (Clamp, Latch, Tilt, Shuttle, and others)
Boards
Power Supply
Present sensors
Alignment
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LPM Board PCB
Suction cup, complete
cylinders (Clamp, Latch, Tilt, Shuttle, and others)
Sensors(Protrusion, Present, placement)
Alignment