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Brooks Automation

  • Reliance Robot 3,4axis
    (Series 8 ATR)

    Major OEM: 3axis: Novellus
    Jusung, Rudolph

    4axis: Lam, KLA, SemiLab

  • Reliance Robot Controller
    (Series 8 Controller)

    Major OEM: Novellus, Lam
    Jusung, KLA, SemiLab
    Rudolph

  • Aculigner
    (Series 8 Aligner)

    Major OEM: Novellus, Lam
    Jusung, KLA, SemiLab
    Rudolph

  • Razor Robot
    (Series 9 ATR)

    Major OEM: Novellus, Lam
    Nanomatrix, Eugen tech
    TES, matrix

  • Fusion Controller
    (Series 9 Controller)

    Major OEM: Novellus, Lam
    Nanomatrix, Eugen tech
    TES, matrix

  • Series 9 Aligner

    Major OEM: Lam
    Nanomatrix, Eugen tech
    TES, matrix

PRI & EQUIPE

  • ATM 100

    Major OEM: KLA
    ThermaWave, Others

  • ATM 207

    Major OEM: KLA
    ThermaWave, Others

  • ATM 305

    Major OEM: KLA
    ThermaWave, Others

  • ABM 205

    Major OEM: KLA
    ThermaWave, Others

  • ABM 407

    Major OEM: KLA
    ThermaWave, Others

  • Pre Aligner ABM 200

    Major OEM: KLA ThermaWave, Others

  • Pre Aligner ATM 300

    Major OEM: KLA ThermaWave, Others

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